Probe apparatus

Details Probe apparatus Probe apparatus

2006-10-10

2006-10-10

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750010, C324S758010

Reexamination Certificate

active

07119560

ABSTRACT:
A probe apparatus1includes displacement detection means6disposed on a surface4aof a probe card4from which probing needles41of the probe card4protrude, and control means5for receiving a signal of a positional change of the probe card4from the displacement detection means or a positional change on the stage side, or signals of positional changes of both of them and moving a stage2in a Z axis direction. The displacement detection means detects on the real time basis the positional change of the probe card due to influences of heat, etc, moves the stage to correct the positional change and keeps the contact condition between probing needles of the probe card and electrode pads of a wafer10always constant.

REFERENCES:
patent: 4856904 (1989-08-01), Akagawa
patent: 5644245 (1997-07-01), Saitoh et al.
patent: 6545458 (2003-04-01), Yamazaki
patent: 6784678 (2004-08-01), Pietzschmann
patent: 6927587 (2005-08-01), Yoshioka
patent: 7-66249 (1995-03-01), None
patent: 7-161783 (1995-06-01), None
patent: 2000-68338 (2000-03-01), None
Patent Abstract of Japan Publication No. JP7161783, Published Jun. 23, 1995 in the name of Abe Masaharu.

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