Probe apparatus

Details Probe apparatus Probe apparatus

2005-08-09

2005-08-09

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120, C324S758010

Reexamination Certificate

active

06927587

ABSTRACT:
A probe apparatus includes a mounting member on which an object to be inspected is mounted and a temperature thereof is being adjusted, a probe card arranged opposite to the mounting member, a driving mechanism which changes a relative positional relationship between the mounting member and the probe card, and a sensor which detects the distance between the sensor and the probe card. By way of detecting the height of the deformed probe card through the use of the sensor and revising the elevation distance of the mounting member, the electrode pads of the wafer W and the probe pins can electrically contact each other with a stable pin pressure, providing high inspection reliability and an increase in throughput.

REFERENCES:
patent: 5550480 (1996-08-01), Nelson et al.
patent: 6140828 (2000-10-01), Iino et al.
patent: 6809536 (2004-10-01), Suzuki
patent: 2002/0011854 (2002-01-01), Kuji et al.
patent: 2002/0024354 (2002-02-01), Pietzschmann

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