Probe apparatus

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

Reexamination Certificate

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Details

C324S754090

Reexamination Certificate

active

07944200

ABSTRACT:
A probe apparatus includes a holding frame holding a test head through a biasing unit biasing the test head. An annular member is rotatably mounted in an opening of a ceiling plate of a main body. Cam followers are rotatably provided circumferentially on the annular member. An intermediate connecting member is provided in a lower surface of the test head, for bringing the test head into electrical contact with an upper surface of the probe card. Protrusions for guiding the cam followers are provided corresponding thereto at an outer periphery of the intermediate connecting member, upper surfaces of the protrusions being inclined. The cam followers are moved relatively upward along the respective inclined surfaces of the protrusions by rotating the annular member so that the intermediate connecting member is pushed downward against a biasing force of the biasing unit to bring the test head into press-contact with the probe card.

REFERENCES:
patent: 7301326 (2007-11-01), Green et al.
patent: 1-272982 (1989-10-01), None
patent: 2-177343 (1990-07-01), None
patent: 3-22546 (1991-01-01), None
patent: 10-50778 (1998-02-01), None

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