Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1990-12-31
1992-02-04
Noland, Tom
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158F, 118712, 374 45, 414222, G01R 3126
Patent
active
050862707
ABSTRACT:
A probe apparatus having a measuring section with a first system for electrically measuring an object. A loader section has a second system for carrying objects to the measuring section and a marking section has a third system for marking objects. These sections are independent of each other so that a vibration occurring in one section is not transmitted to the other sections.
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Itoyama Taketoshi
Karasawa Wataru
Koike Hisashi
Obikane Tadashi
Takao Itaru
Noland Tom
Tokyo Electron Limited
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