Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1994-08-10
1996-02-13
Wieder, Kenneth A.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
3241581, 324 725, G01R 3102
Patent
active
054914272
ABSTRACT:
An apparatus and method for providing durable, high performance, probing of semiconductor devices having a large number of narrow pitch terminals. A single probe of the present invention provides flexible probing of a wide range of the devices having various sizes and terminal arrangements. In contrast, teachings of the prior art require a separate probe to be manufactured or a probe to be re-formed for each different size and terminal arrangement of the devices. The probe of the invention includes electrodes electrically coupled with a test system in such a way so as to provide the devices to be probed with a selection of more than two arrangements in which device terminals contacting the probe electrodes are not shorted with each other by the probe.
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January Kister and Robert L. Franch, "Advances in Membrane Probe Technology", IEEE, International Test Conference, Sep., 1992, pp. 927-935.
Brian Leslie and Farid Matta, "Membrane Probe Card Technology", IEEE, 1988 International Test Conference, Sep., 1988, pp. 601-607.
January (Jarek) Kister, and Tammy Fisher; "Probe Technology".
Packard Hughes Interconnect, Product Document at Semicon West '93.
D. J. Herrell, "Chip Test Adapter Lifetime Extension Technique", vol. 26, No. 2, IBM Disclosure Bulletin, New York, USA, p. 485.
Kondoh You
Ueno Toshiaki
Hewlett--Packard Company
Wardas Mark
Wieder Kenneth A.
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