Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-03-07
2006-03-07
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S065000
Reexamination Certificate
active
07009688
ABSTRACT:
A photosensitive area11, such as a photolithographic sheet, in an images plane is notionally subdivided in both dimensions to form contiguous (tiled) sub-areas. Variable illumination means1,4provides a selected pixellated light pattern, which is directed8, 9, 10to fill a selected one of the sub-areas so that pixels of said pattern are, at least 15 microns across at the sub-area, and control means are responsive to an input signal representative of an image conjointly to control the production and direction of the pixellated patterns so that an entire image is produced over all of the said sub-areas. As shown, the variable illumination means comprises a light source2with digital micro-mirror array deflector device4, and the sub-area is selected by lens array8with a shutter10and polariser array11. The latter may be replaced by a two-axis steering mirror and lens array. An analogue micro-mirror array, optionally with, a kaleidoscope, may be used in the illumination means, with (a) collimating optics and lens array; or (b) a focussing macro-lens, for sub-area selection.
REFERENCES:
patent: 4668080 (1987-05-01), Gale et al.
patent: 4769680 (1988-09-01), Resor et al.
patent: 5331338 (1994-07-01), Mager
patent: 5691541 (1997-11-01), Ceglio et al.
patent: 6211948 (2001-04-01), Lullau et al.
patent: 6411366 (2002-06-01), Luellau et al.
patent: 2001/0038268 (2001-11-01), Fuchsberger et al.
patent: 2002/0012110 (2002-01-01), Luellau
patent: 0 253 129 (1988-01-01), None
patent: 0 845 710 (1998-06-01), None
patent: 0 933 925 (1999-08-01), None
patent: 2 284 684 (1995-06-01), None
patent: 2 330 471 (1999-04-01), None
Rudge, et al. “Fly's-Eye Lens Technique for Generating Semiconductor Device Fabrication Masks”, IBM Journal, Apr. 1963, pp. 146-150.
International Search Report for PCT/GB01/05438.
Miller Richard Jonathan
Smith Mark Anthony Gleeson
Kim Peter B.
McDonnell Boehnen & Hulbert & Berghoff LLP
Qinetiq Limited
LandOfFree
Printing by active tiling does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Printing by active tiling, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Printing by active tiling will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3534347