Printing – Printing members and inkers
Reexamination Certificate
2004-03-04
2010-06-08
Yan, Ren (Department: 2854)
Printing
Printing members and inkers
C101S109000, C101S368000
Reexamination Certificate
active
07730834
ABSTRACT:
The printing apparatus, presented herein, comprises a patterning device having a curved member that supports a stamp on its surface. The curved member is adapted to roll over a substrate to be printed on to transfer the pattern onto the substrate. An illumination system directs light onto the region of the substrate that is being printed in order to set a layer of resist, which has been sprayed onto the substrate. The light is directed via a pattern that is made on the surface of the stamp, thereby transferring the pattern to the substrate.
REFERENCES:
patent: 2905085 (1959-09-01), Mercer et al.
patent: 3298304 (1967-01-01), Carlsen
patent: 3361548 (1968-01-01), Hamilton et. al.
patent: 3362804 (1968-01-01), Hamilton
patent: 5512131 (1996-04-01), Kumar et al.
patent: 5772905 (1998-06-01), Chou
patent: 6165911 (2000-12-01), Calveley
patent: 6309580 (2001-10-01), Chou
patent: 6334960 (2002-01-01), Willson et al.
patent: 6365059 (2002-04-01), Pechenik
patent: 6375870 (2002-04-01), Visovsky et al.
patent: 6482742 (2002-11-01), Chou
patent: 6518189 (2003-02-01), Chou
patent: 6656341 (2003-12-01), Petersson et al.
patent: 6696220 (2004-02-01), Bailey et al.
patent: 6719915 (2004-04-01), Willson et al.
patent: 6921615 (2005-07-01), Sreenivasan et al.
patent: 7070406 (2006-07-01), Jeans
patent: 2002/0093122 (2002-07-01), Choi et al.
patent: 2002/0094496 (2002-07-01), Choi et al.
patent: 2002/0132482 (2002-09-01), Chou
patent: 2002/0167117 (2002-11-01), Chou
patent: 2002/0177319 (2002-11-01), Chou
patent: 2003/0034329 (2003-02-01), Chou
patent: 2003/0080471 (2003-05-01), Chou
patent: 2003/0080472 (2003-05-01), Chou
patent: 2003/0081193 (2003-05-01), White et al.
patent: 2003/0127580 (2003-07-01), Ling et al.
patent: 2003/0139042 (2003-07-01), Heidari
patent: 2003/0141291 (2003-07-01), Heidari et al.
patent: 2003/0159608 (2003-08-01), Heidari
patent: 2003/0170053 (2003-09-01), Montelius et al.
patent: 2003/0189273 (2003-10-01), Olsson
patent: 2004/0005444 (2004-01-01), Heidari
patent: 2004/0009673 (2004-01-01), Sreenivasan et al.
patent: 2004/0021866 (2004-02-01), Watts et al.
patent: 2004/0022888 (2004-02-01), Sreenivasan et al.
patent: 2004/0036201 (2004-02-01), Chou et al.
patent: 2004/0046288 (2004-03-01), Chou
patent: 2004/0081798 (2004-04-01), Lee et al.
patent: 2004/0124566 (2004-07-01), Sreenivasan et al.
patent: 2004/0149367 (2004-08-01), Olsson et al.
patent: 2004/0169003 (2004-09-01), Lee et al.
patent: 2004/0192041 (2004-09-01), Jeong et al.
patent: 2004/0200411 (2004-10-01), Willson et al.
patent: 2004/0209470 (2004-10-01), Bajorek
patent: 2004/0219249 (2004-11-01), Chung et al.
patent: 2004/0219461 (2004-11-01), Chung et al.
patent: 2005/0039618 (2005-02-01), Heidari et al.
patent: 2005/0064054 (2005-03-01), Kasumi
patent: 5-080530 (1993-04-01), None
patent: 7-005693 (1995-01-01), None
patent: 9-243817 (1997-09-01), None
patent: 2000-039702 (2000-02-01), None
patent: 2000289317 (2000-10-01), None
patent: 2001-198979 (2001-07-01), None
patent: 2004-071831 (2004-03-01), None
patent: 2005-012040 (2005-01-01), None
patent: WO 9928132 (1999-06-01), None
patent: WO 01/79591 (2001-10-01), None
patent: WO 01/79592 (2001-10-01), None
Stephen Y. Chou, et al., “Nanoimprint Lithography”, J. Vac. Sci. Technol: B 14(6), Nov./Dec. 1996, pp. 4129-4133.
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Yan Ren
LandOfFree
Printing apparatus and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Printing apparatus and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Printing apparatus and device manufacturing method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4153730