Printing apparatus

Details Printing apparatus Printing apparatus

1978-10-06

1980-08-05

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Original moves continuously

350 55, 350199, 355 45, 355 60, G03B 2748, G03B 2750, G03B 2770

Patent

active

042159342

ABSTRACT:
A printing apparatus for use in the manufacture of semiconductor circuit elements, comprising a fixed mirror imaging system. A mask holder and wafer holder are respectively provided in an upper horizontal plane and a lower horizontal plane on the optical axis above and below said mirror imaging system, the light emerging from the mask being introduced into said system by a mirror inclined at 45.degree. to the optical axis while the light emerging from said system is directed to the wafer by an another mirror inclined at 45.degree. to the optical axis. The mask holder and wafer holder are integrally movable in the horizontal direction to allow formation of the entire image of mask on the wafer.

REFERENCES:
patent: 3748015 (1973-07-01), Offner
patent: 4011011 (1977-03-01), Hemstreet et al.

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