Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1993-08-03
1995-01-17
Bucci, David A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414416, 414937, 414939, 414940, H01L 2102, B65G 4900
Patent
active
053821270
ABSTRACT:
A pressurized interface apparatus (200) is provided for transferring a workpiece from within a pressurized sealable transportable container (100) into a specified environment and vice versa. The container consists of a box-shaped housing (102) having an access opening (104) sealed by a releasable door (124) and having a gas injection valve (129). The interface apparatus includes an IN/OUT section having a box-shaped frame (201) with a port zone defining an interior space (204) provided with a first opening (205A) and a second opening (205'A) opposite thereto and communicating with the specified environment. The apparatus further includes a lid controlled by a drive (209A) to seal the first opening and cause the port zone to operate as a load lock chamber. A transfer handler (216A) having a workpiece gripper (218A) is mounted within the port zone. A container receiver is positioned in front of the first opening for receiving a container in a waiting position or in a working position adjacent the first opening. A clamping/actuating device (225a and b) clamps and moves the container between the working and waiting positions.
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Garric George
Lafond Andre
Bucci David A.
Huberfeld Harold
International Business Machines - Corporation
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