Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2006-12-26
2006-12-26
Cygan, Michael (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
C073S756000
Reexamination Certificate
active
07152479
ABSTRACT:
A pressure transmitter has a housing (11) on which a pressure sensor (12) is fastened. There is provided in the housing a region, produced micromechanically, with reduced wall thickness that forms a separating diaphragm (22) such that the fluid located in a channel (16) does not act on the pressure sensor (12). The pressure sensor (12) is connected with a sensor diaphragm (24) directly to the separating diaphragm via a connecting layer (23), thereby rendering possible a highly space-saving design of the pressure transmitter. Consequently, the pressure transmitter can be formed, for example, by the pressure sensor and a channel structure, for example a microreactor, produced in a micromechanical design. A small dead volume in the channel structure is thereby produced in the region of the pressure transmitter.
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Krause Peter
Steckenborn Arno
Allen Andre
Cygan Michael
Young & Thompson
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