Measuring and testing – Fluid pressure gauge – Mounting and connection
Patent
1991-06-19
1992-07-28
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Mounting and connection
73706, 73708, 73721, 73727, 338 4, C01L 708, C01L 906
Patent
active
051332159
ABSTRACT:
The apparatus for sensing pressure comprises a header, having at least one input port for receiving a substance under pressure. A substrate, having a wafer-like shape with a relatively large surface area in comparision to its thickness, includes at least one internal passage to couple the substance under pressure. A pressure sensing element is mounted onto the surface of the substrate over an exit port of the internal passage coupling the substance under pressure. The substrate is bonded to a surface of the header at extreme locations from a location in which the pressure sensing element is mounted. Thus isolation is provided for the pressure sensing element from unwanted stresses induced in the substrate.
REFERENCES:
patent: 4683757 (1987-08-01), Adams et al.
patent: 5062302 (1991-11-01), Petersen et al.
Lane, III Charles E.
Wilda Douglas W.
Honeywell Inc.
Lenkszus D.
Sapelli A. A.
Udseth W.
Woodiel Donald O.
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