Pressure transducer with reduced offset signal

Details Pressure transducer with reduced offset signal Pressure transducer with reduced offset signal

1990-07-27

1992-12-29

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 73727, 73756, 338 4, G01L 708

Patent

active

051741563

ABSTRACT:
A structure and method of making a piezoresistive transducer with reduced offset current. The transducer is comprised of a piezoresistive die having a support rim and a diaphragm, and a support housing having a wall and an aperture. The shape of the diaphragm is matched with the shape of the aperture while the shape of the support rim is matched with the shape of the wall. By matching these shapes, temperature induced stresses are reduced, thus reducing temperature induced offset currents.

REFERENCES:
patent: 4502335 (1985-03-01), Wamstad et al.
patent: 4530244 (1985-07-01), Starr
patent: 4790192 (1988-12-01), Knecht et al.
patent: 5001934 (1991-03-01), Tuckey
patent: 5029479 (1991-07-01), Bryan

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