Pressure transducer with error compensation from cross-coupling

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73721, 338 42, G01L 904, G01L 906

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active

060239786

ABSTRACT:
A pressure transducer that includes at least two sensors having substantially similar or substantially identical error characteristics, wherein each sensor is arranged to be subjected to an applied pressure and the outputs of the sensors are electrically coupled so that errors associated with one sensor are compensated by errors associated with the other sensor. The sensors may be substantially identical silicon sensors formed in close proximity on the same wafer.

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