Pressure transducer with an invariable reference capacitor

Details Pressure transducer with an invariable reference capacitor Pressure transducer with an invariable reference capacitor

1982-05-21

1983-12-20

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, H01G 700

Patent

active

044221258

ABSTRACT:
A quartz capacitive pressure transducer including a sensing plate and a reference plate disposed on one quartz substrate which are opposed across a gap by a common plate on another quartz substrate to form capacitances. The substrates are maintained in their opposing relationship by an annular frit which seals a chamber between the substrates to a reference pressure. The reference plate is disposed in the area occupied by the frit annulus to provide a reference capacitance that has a zero pressure gradient.

REFERENCES:
patent: 4064550 (1977-12-01), Dias et al.
patent: 4274125 (1981-06-01), Vogel
patent: 4380041 (1983-04-01), Ho

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