Measuring and testing – Fluid pressure gauge – Mounting and connection
Patent
1995-09-25
1997-11-25
Chilcot, Richard
Measuring and testing
Fluid pressure gauge
Mounting and connection
G01L 700
Patent
active
056914792
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
The present invention concerns a pressure measurement transducer with a disk-shaped pressure sensor component that is welded to a pressure supplying body in the edge area of one side, with a cap-like part surrounding the pressure sensor component on the outside and with its bottom above the side of the pressure sensor component that faces away from the pressure supplying body, where insulated electric connecting wires pass through the bottom, and with a pressure transmitting part that is connected by a separating membrane to a side of the pressure supplying body farthest away from the pressure sensor component.
A pressure transducer of this type is described in German patent 3,047,276 A1. Although the transducer disclosed in that publication is referred to as a differential pressure transducer, it is actually a pressure transducer using atmospheric pressure as the reference pressure. With the known pressure transducer, the disk-shaped pressure sensor component is manufactured individually for the pressure transducer by mounting a semiconductor pressure sensor element on a sensor supporting body. The sensor supporting body is held in a disk-shaped sealing part by welding. The sealing part also has a ceramic substrate surrounding the pressure sensor element and having connecting wires that are attached to electric terminals of the pressure sensor element. The structure consisting of the pressure sensor element and the ceramic substrate is protected by a ceramic safety cover. In addition, a metal disk that closes a low-pressure-side connection of the sensor supporting body on the low pressure side is welded in the side of the sealing part that faces away from the pressure sensor element. The pressure sensor component of the known pressure transducer with this structure is welded to a pressure supplying body at the edges. This pressure supplying body is provided with a through hole for the pressure feed on the high-pressure side and with another through hole for the low-pressure feed for the pressure sensor component. The pressure supplying body also contains a transducer middle part with a compensating membrane and it is connected to a pressure transmitting part by a separating membrane.
SUMMARY OF THE INVENTION
The present invention provides a pressure transducer that can be manufactured easily and therefore inexpensively.
According to this invention, this object is achieved with a pressure transducer of the pressure sensor type described initially as a standard pressure sensor with a base of the type conventionally used in the production of semiconductor components with electric connecting wires and a connecting tube on the low pressure side. The base of the standard pressure sensor is in contact with the bottom of the cap-like part via an intermediate filling of cast resin. The cap-like part has individual through holes for the connecting wires and the connecting tube on the low-pressure side, and the cap-like part is welded to the pressure transmitting part.
An important advantage of the pressure transducer according to the present invention is that it is equipped with a standard pressure sensor. Such pressure sensors are relatively inexpensive. However, standard pressure sensors cannot be used universally because of their relatively low mechanical stability. Instead, manufacturers recommend that the base be supported with a steel plate in order to achieve adequate mechanical stability (see Siemens Data Book 1990/91 "Silicon Temperature and Pressure Sensors," page 98). With the pressure transducer according to the present invention, this requirement is easily met by the fact that the standard pressure sensor is in contact with the bottom of the cap-like part, which is weakened only insignificantly by the individual through holes for the connecting wires and the connecting tube, via the intermediate cast resin filling. This assures that the cap-like part will provide adequate mechanical support, and the cast resin assures a uniform pressure load on the standard pressure sens
REFERENCES:
patent: 4653330 (1987-03-01), Hedtke
patent: 4754648 (1988-07-01), Byrd et al.
patent: 4918833 (1990-04-01), Allard et al.
Siemens Datenbuch 1990/91 (Siemens Databook 1990/91): Silizium Temperatur-und Drucksensoren (Silicon Temperature Sensors and Pressure Sensors) p. 98.
rtp Regelungstechnische Praxis, vol. 24, 1982, No. 7, pp. 223-230: Halbleiter-Druckaufnehmer mit Integrierter Piezoresistiver Widerstandsbrucke, U. Theden et al., Berlin, DE.
Krisch Burkhard
Riedel Werner
Chilcot Richard
Oen William L.
Siemens Aktiengellschaft
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