Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1984-08-29
1987-06-23
Goldberg, E. A.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
338 3, G01L 122
Patent
active
046756434
ABSTRACT:
A piezoresistive transduction element for incorporation into a pressure transducer includes a plate defining a diaphragm zone and preferably of silicon with piezoresistances diffused into it, an insulating plate of a glass material and a base plate. The plates are preferably connected to each other by anodic connections in a series of steps. The base plate is made of a material having substantially the same coefficient of thermal expansion as that of the material of the plate which defines the diaphragm zone. Furthermore, the dimensions of the base plate are matched to those of the diaphragm plate. By these measures the deformation forces exerted by the base plate and diaphragm plate on the insulating plate upon changes in temperature are of substantially the same magnitude and therefore there is minimum bending of the diaphragm plate. A symmetrical transduction element is created which has minimum zero point displacement and minimum sensitivity changes in use. Pressure transducers equipped with such piezoresistive transduction elements are therefore appropriate for high measuring accuracy, particularly in combination with an improved, elastically extensible securement of a holder which carries the transduction element within the transducer housing.
REFERENCES:
patent: 4303903 (1981-12-01), Matsuoka et al.
patent: 4314225 (1982-02-01), Tominaga et al.
patent: 4527428 (1985-07-01), Shimada et al.
Calderara Reto
Sonderegger Hans-Conrad
Tanner Rene
Wenger Alfred
Goldberg E. A.
Kristal Instrumente AG
Lateef M. M.
LandOfFree
Pressure transducer utilizing a transduction element does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pressure transducer utilizing a transduction element, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure transducer utilizing a transduction element will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-724246