Pressure transducer for gaseous hydrogen environment

Details Pressure transducer for gaseous hydrogen environment Pressure transducer for gaseous hydrogen environment

2007-06-12

2007-06-12

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S715000, C073S753000

Reexamination Certificate

active

11125062

ABSTRACT:
A silicon-based hydrogen pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate that shields the cavity formed by the silicon membrane and cell body from hydrogen permeation. A bossed container filled with an oil material is mounted on the substrate and houses a sensor cell. The oil material may be impregnated with a hydrogen getter material.

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Ghezzi F et al: “Problems of determing true equilibrium pressures of hydrogen getters over a wide range of getter temperature and hydrogen sorption” Journal of Vaccum Science and Technology A. Vaccum, Surfaces and Films, American Institute of Physics, New York, NY, US, vol. 17, No. 6, Nov. 1999, pp. 3452-2462, XP012004883 ISSN: 0734-2101 abstract p. 3452, left-hand column, line 1—right-hand column, paragraph 3.

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