Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1989-09-18
1990-11-27
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
29595, 361283, G01L 708, G01L 912
Patent
active
049727176
ABSTRACT:
A pressure responsive variable capacitive transducer is shown in which a flat flexible diaphragm having a capacitor plate disposed thereon is mounted overlying a recess in a substrate having a capacitor plate disposed on the surface of the recess so that the plates are spaced apart a selected distance determined by the depth of the recess. In one embodiment a glass seal is located between the diaphragm and the substrate inwardly of the outer perimeter of the diaphragm while in a second embodiment a glass seal is located outwardly from the outer perimeter of the diaphragm. The substrate is formed with bores adapted to receive electrical connection pins. Electrically conductive traces extend from electrically conductive layers to wells formed in the substrate contiguous with the bores to provide a gradual transition for the traces and an electrically conductive epoxy is infilled to electrically connect the pins to the traces.
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McGraw-Hill Book Company, pp. 434-436.
Review of Scientific Instruments, pp. 444-447.
McAndrews James P.
Southworth Robert
Tomlinson James L.
Haug John A.
McAndrews James P.
Sharp Melvin
Texas Instruments Incorporated
Woodiel Donald O.
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