Pressure transducer apparatus

Details Pressure transducer apparatus Pressure transducer apparatus

1989-06-02

1990-07-24

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Photoelectric

25023119, 25022727, 356358, G01D 534, G01L 708, G01L 900

Patent

active

049427679

ABSTRACT:
A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.

REFERENCES:
patent: 3040583 (1962-06-01), Post
patent: 4158310 (1979-06-01), Chih-Ming Ho
patent: 4408123 (1983-10-01), Sichling et al.
patent: 4589286 (1986-05-01), Berthold, III
patent: 4678902 (1987-07-01), Perlin
patent: 4678909 (1987-07-01), Jackson e al.
patent: 4682500 (1987-07-01), Kazutaka
patent: 4711246 (1987-12-01), Alderson

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