Pressure transducer apparatus

Details Pressure transducer apparatus Pressure transducer apparatus

1990-09-17

1991-09-03

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 361283, G01L 708, G01L 912

Patent

active

050442023

ABSTRACT:
A pressure responsive variable capacitive transducer is shown in which a flat flexible diaphragm having a capacitor plate disposed thereon is mounted overlying a recess in a substrate having a capacitor plate disposed on the surface of the recess so that the plates are spaced apart a selected distance determined by the depth of the recess. In one embodiment a glass seal is located between the diaphragm and the substrate inwardly of the outer perimeter of the disphragm while in a second embodiment a glass seal is located outwardly from the outer perimeter of the diaphragm. The substrate is formed with bores adapted to receive electrical connection pins. Electrically conductive traces extend from electrically conductive layers to wells formed in the substrate contiguous with the bores to provide a gradual transition for the traces and an electrically conductive epoxy is infilled to electrically connect the pins to the traces.

REFERENCES:
patent: 3962921 (1976-06-01), Lips
patent: 4829826 (1989-05-01), Valentin et al.

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