Pressure transducer

Details Pressure transducer Pressure transducer

1983-12-09

1986-01-21

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

361283, G01L 912

Patent

active

045650969

ABSTRACT:
A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer is configured such that each diaphragm responsive to P1 or P2 respectively also affects a fluid in a closed common fluid cavity such that the deflection of the diaphragm is representative of the pressure differential (P1-P2).

REFERENCES:
patent: 3618390 (1971-11-01), Frick
patent: 4207604 (1980-06-01), Bell
patent: 4222277 (1980-09-01), Kurtz et al.
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4326423 (1982-04-01), Hartemann
patent: 4398194 (1983-08-01), Johnston
Behr, M. and J. Giachino, "A Miniature Pressure Sensor for Automotive Applications," I Mech E. Conference Pub. 1981-10 (1981), Presented at The Third International Conference on Automotive Electronics at London in Oct. 1981.
Drawing "CPT-II" (FIG. 6.3) Acknowledged as Prior Art.

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