Electrical resistors – Resistance value responsive to a condition – Fluid- or gas pressure-actuated
Patent
1979-10-03
1982-03-23
Albritton, C. L.
Electrical resistors
Resistance value responsive to a condition
Fluid- or gas pressure-actuated
73721, 338 4, H01L 1010
Patent
active
043215785
ABSTRACT:
A pressure transducer is arranged to mount a semiconductor pressure sensor in a housing such that the pressure of a high-pressure fluid is applied to one side of the semiconductor pressure sensor through a high pressure seal diaphragm and a sealed liquid in the high pressure side, while the pressure of a low-pressure fluid is applied to the other side of the sensor through a low-pressure seal diaphragm and a sealed liquid in the low pressure side, and a protecting member is provided closer to the low-pressure seal diaphragm.
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Nagasu Akira
Nagata Takeo
Sakurai Yutaka
Uchida Hiroyasu
Yamamoto Yosimi
Albritton C. L.
Hitachi , Ltd.
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