Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1981-03-11
1983-01-04
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
361283, G01L 912
Patent
active
043667163
ABSTRACT:
A pressure transducer which produces an output capacitance signal which is unaffected by temperature or mechanical distortion. A sensing chamber is provided at the center of a pressure sensor body with the sensing chamber being filled with a sealed liquid. A moving electrode of a cantilever structure is disposed in the sensing chamber and a through hole extends from the sensing chamber to at least one side of the pressure sensor body. A pressure receiving element is disposed on at least one side of the pressure sensor body and a rod couples the pressure receiving element and the moving electrode through the through hole. Two fixed electrodes of a cantilever structure are disposed opposite the moving electrode to form first and second variable capacitance elements together with the moving electrode.
REFERENCES:
patent: 3413857 (1968-12-01), Ellis
patent: 3783693 (1974-01-01), Paros
patent: 3878725 (1975-04-01), Gaertner
patent: 4311053 (1982-01-01), Cucci
Hokushin Electric Works, Ltd.
Woodiel Donald O.
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