Pressure transducer

Details Pressure transducer Pressure transducer

1985-04-08

1987-05-19

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

29610SG, 73708, 338 4, 338 42, G01L 906

Patent

active

046657541

ABSTRACT:
Disclosed is a pressure transducer comprising a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium. The transducer further comprises a pressure vessel having an aperture and apparatus including a hermetic seal for mounting the die with the front side of the die facing the aperture. In this manner, the die is compressed toward the pressure vessel when positive pressure is applied to the back side of the die by the pressure medium.

REFERENCES:
patent: 4364276 (1982-12-01), Shimazoe et al.
patent: 4399707 (1983-08-01), Wamstad
Shadrin et al., Instruments and Experimental Techniques, vol. 18, No. 2, pt. 2, pp. 559-560.
Johnson, R. L. et al; "An Advanced Solid State Pressure Transducer for High Reliability SSME Application;" pp. 320-331, (presented Jun. 27-29, 1984 at the George C. Marshall Space Flight Center, Huntsville, Alabama; published following presentation).

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