Electrical resistors – Resistance value responsive to a condition – Fluid- or gas pressure-actuated
Patent
1974-10-09
1976-07-06
Albritton, C. L.
Electrical resistors
Resistance value responsive to a condition
Fluid- or gas pressure-actuated
73 885SD, 338 4, 357 26, H01C 716
Patent
active
039684660
ABSTRACT:
A pressure transducer includes a semiconductor diaphragm of a predetermined conductivity having a strain sensitive region capable of being elastically deformed by means of the external pressure applied thereto, a fixing region having a high degree of rigidity, central and peripheral strain sensitive elements disposed along the crystallographic directions thereof and exhibiting high sensitivity and which are respectively insulatingly disposed within the vicinity of the central and peripheral portions of the strain sensitive region of the diaphragm, lead portions insulatingly disposed upon the diaphragm and extending from the strain sensitive region to one side of an end portion in the fixing region for transmitting electrical signals from the sensitive elements, the leads being connected to the central and peripheral strain sensitive elements at one end thereof in order to collectively form a bridge circuit, and electrodes respectively provided upon the other end portions of the lead portions and within the end portion of the fixing region. A supporting member includes a supporting portion for supporting the semiconductor diaphragm through means of the fixing region of the diaphragm, and a leading portion for conducting the electrical signals therethrough, lead wires being connected to the electrodes of the lead portions and being passed through the leading portion of the supporting member. The pressure transducer transmits the electrical signals detected by means of the strain sensitive elements to the electrodes by means of the lead portions and in turn conducts the electrical signals through the lead wires to the processing apparatus. As the pressure transducer does not require internal space for connecting the lead wires to the strain sensitive elements, the pressure transducer is extremely thin and compact and is suitable for mass-production.
REFERENCES:
patent: 3654579 (1972-04-01), Kurtz
patent: 3739315 (1973-06-01), Kurtz
patent: 3764950 (1973-10-01), Wallia
Nakamura Hiroshi
Sugiyama Susum
Tsukada Kouji
Albritton C. L.
Kabushiki Kaisha Toyota Chuo Kenkyusho
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