Pressure transducer

Details Pressure transducer Pressure transducer

1977-04-18

1978-03-28

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73725, 338 4, 338 42, G01L 906

Patent

active

040808300

ABSTRACT:
A pressure transducer of miniature design with a silicon diaphragm which is provided with a monolithic resistor arrangement, the resistance of which changes with the deformation of the diaphragm in which the diaphragm is arranged between two overload bodies, one of which rests on a support body, whose surfaces facing the diaphragm are each provided with a pressure chamber and pressure canals to obtain an overload-proof pressure transducer which is very small and can be used for measuring large pressure differences.

REFERENCES:
patent: 3762208 (1973-10-01), Bice et al.

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