Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation
Reexamination Certificate
2009-08-05
2010-11-30
Caputo, Lisa M (Department: 2855)
Measuring and testing
Fluid pressure gauge
With pressure and/or temperature compensation
C073S715000, C073S753000, C361S283400
Reexamination Certificate
active
07841238
ABSTRACT:
The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a passivation layer deposited on the CMOS layers. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid. The reference membrane provides a temperature compensating reference capacitance. The arrangement also has sensor circuitry configured to determine a charge imbalance indicative of a pressure difference between the active and reference membranes.
REFERENCES:
patent: 4120206 (1978-10-01), Rud, Jr.
patent: 4169389 (1979-10-01), Yasuhara et al.
patent: 4458537 (1984-07-01), Bell et al.
patent: 4572000 (1986-02-01), Kooiman
patent: 5233875 (1993-08-01), Obeirmeier et al.
patent: 5285097 (1994-02-01), Hirai
patent: 5499158 (1996-03-01), Bishop et al.
patent: 5499535 (1996-03-01), Amano et al.
patent: 5802911 (1998-09-01), Cahill et al.
patent: 5853020 (1998-12-01), Widner
patent: 5911162 (1999-06-01), Denner
patent: 5962791 (1999-10-01), Walchli et al.
patent: 5965821 (1999-10-01), Grudzien
patent: 6058780 (2000-05-01), Bernot et al.
patent: 6205861 (2001-03-01), Lee
patent: 6235174 (2001-05-01), Jaurnig
patent: 6377056 (2002-04-01), Hanzawa et al.
patent: 6405132 (2002-06-01), Breed et al.
patent: 6445053 (2002-09-01), Cho
patent: 6484080 (2002-11-01), Breed et al.
patent: 6487911 (2002-12-01), Frackelton et al.
patent: 6526352 (2003-02-01), Breed et al.
patent: 6533316 (2003-03-01), Breed et al.
patent: 6568274 (2003-05-01), Lucas et al.
patent: 6648367 (2003-11-01), Breed et al.
patent: 6662642 (2003-12-01), Breed et al.
patent: 6733036 (2004-05-01), Breed et al.
patent: 6738697 (2004-05-01), Breed
patent: 6741169 (2004-05-01), Magiawata et al.
patent: 6758089 (2004-07-01), Breed et al.
patent: 6768944 (2004-07-01), Breed et al.
patent: 6892582 (2005-05-01), Satou et al.
patent: 7353711 (2008-04-01), O'Dowd et al.
patent: 2003/0205089 (2003-11-01), Nelson et al.
patent: 0261972 (1988-03-01), None
patent: 0756164 (1997-01-01), None
patent: 09-257618 (1997-10-01), None
patent: 2002-111011 (2002-04-01), None
patent: 2004-517305 (2002-04-01), None
patent: WO 03/106952 (2003-12-01), None
Mallinson Samuel George
Silverbrook Kia
Caputo Lisa M
Jenkins Jermaine
Silverbrook Research Pty Ltd
LandOfFree
Pressure sensor with temperature compensation does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pressure sensor with temperature compensation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor with temperature compensation will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4243535