Pressure sensor with non-planar membrane

Details Pressure sensor with non-planar membrane Pressure sensor with non-planar membrane

2006-10-24

2006-10-24

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S715000, C073S718000

Reexamination Certificate

active

07124643

ABSTRACT:
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber partially defined by a flexible membrane (20), the chamber containing a fluid at a reference pressure, such that the flexible membrane (20) deflects due to pressure differentials between the reference pressure and the fluid pressure; and,associated circuitry for converting the deflection of the flexible membrane (20) into an output signal indicative of the fluid pressure; wherein,the membrane (20) is non-planar (22, 24).It is possible to extend the linear range of the pressure-deflection response with a non-planar membrane (20). Corrugations, a series of raised annuli (22) or other surface features are an added complexity in the fabrication process but can extend the linear range of the sensor by 1 MPa.

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