Pressure sensor with integrated structure

Details Pressure sensor with integrated structure Pressure sensor with integrated structure

2008-07-22

2008-07-22

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

With protective separator

Reexamination Certificate

active

10559936

ABSTRACT:
Pressure sensor with an integrated structure comprising a support (33, 133, 233) and a silicon die (11), which lies substantially on the same plane as the upper surface (37, 137, 237) of the support and is integrated in a seat (34, 134, 234) made in the thickness of the support. On the inside face (23) of the die (11), in contact with the fluid the pressure of which has to be measured, is a protective layer.

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patent: 5454270 (1995-10-01), Brown et al.
patent: 6116269 (2000-09-01), Maxson
patent: 6148673 (2000-11-01), Brown
patent: 6351996 (2002-03-01), Bryzek et al.
patent: 0 386 959 (1990-09-01), None

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