Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1983-09-20
1985-04-16
Envall, Jr., Roy N.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
338 2, 73720, 73726, 73777, 73DIG4, G01L 906
Patent
active
045118787
ABSTRACT:
Provided is a pressure sensor of semiconductor type, having a semiconductor diaphragm, wherein the diaphragm comprises at least one of thin wall parts and at least one of thick wall parts, and defines therein recesses formed in the lower surface of the diaphragm below the thin wall parts, piezoresistance elements are laid on the upper surface of the diaphragm near the thin wall parts, and a supporting member is sealingly jointed to the thick wall parts at the lower surface of the diaphragm, so that the recesses are sealed and confined so as to prevent high pressure fluid from blowing off when the thin wall part is broken.
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Zinker, "Diffused Si--Diaphragm, Pressure Transducer", 5th Annual ISA Test Symposium, Advances in Instruments No. 68-503, New York, Oct. 1968, pp. 1-5.
Vagonov et al., "Properties of Diffusion Strain Gauge Resistances of Pressure Transducers w/ Si--Diaphragms, Measurement Techniques, Izmetitel'naya Tekhnika, vol. 16, No. 7, pp. 1004-1006, Jul. 1973.
Allan, R., "X--Shaped Sensor Simplifies Transducer", Electronics, Sep. 25, 1980.
Kawakami Kanji
Kobori Shigeyuki
Murayama Ken
Shimada Satoshi
Envall Jr. Roy N.
Hitachi , Ltd.
Hitachi Const. Mach. Company
Sears C. N.
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