Pressure sensor with improved capacitive pressure transducer

Details Pressure sensor with improved capacitive pressure transducer Pressure sensor with improved capacitive pressure transducer

1986-05-05

1987-12-29

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, H01G 700, G01L 912

Patent

active

047164921

ABSTRACT:
A pressure sensor comprises an improved capacitive pressure transducer having a first capacitor plate secured to a limited portion of a first surface of a relatively rigid ceramic substrate and having a diaphragm with an electrically conductive surface forming a second capacitor plate, the diaphragm being secured to the ceramic substrate at a location spaced inwardly from the periphery of that first substrate surface for disposing the second capacitor plate in spaced, overlying relation to the first capacitor plate to be movable in response to applied pressure for varying the capacitor formed by the plates. Support means bear against opposite surfaces of the ceramic substrate at the periphery of the substrate for mounting the transducer with the diaphragm thereof substantially free of mounting stresses to be exposed to a pressure force in a pressure zone to be monitored.

REFERENCES:
patent: 4227419 (1980-10-01), Park
patent: 4389895 (1983-06-01), Rud
patent: 4425799 (1984-01-01), Park
patent: 4490773 (1984-12-01), Moffatt

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