Pressure sensor with dual chambers

Details Pressure sensor with dual chambers Pressure sensor with dual chambers

2007-07-29

2009-08-04

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S754000, C361S283100

Reexamination Certificate

active

07568395

ABSTRACT:
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer to form a sealed reference chamber. A cap defines apertures. The cap extends from the substrate assembly to cover the membrane and thereby form an apertured chamber.

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