Pressure sensor with deflectable diaphragm

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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C073S724000

Reexamination Certificate

active

07415886

ABSTRACT:
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a pressure applied to the cavity. An electrode on the diaphragm forms a variable capacitor with the pressure sensor body. The capacitance varies in response to the applied pressure.

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Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration of PCT/US2006/020254.
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