Pressure sensor with conductive ceramic membrane

Details Pressure sensor with conductive ceramic membrane Pressure sensor with conductive ceramic membrane

2007-01-09

2007-01-09

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S717000, C073S753000

Reexamination Certificate

active

10965903

ABSTRACT:
A pressure sensor (30) for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber (58) partially defined by a flexible membrane (50), the chamber (58) containing a fluid at a reference pressure, such that the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure; and,associated circuitry (34) for converting the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure; wherein,the membrane (50) is at least partially formed from a metal ceramic material.Metal ceramics can be deposited as a thin membrane with sufficient flexibility for sensing pressure while providing corrosion and wear resistance. Furthermore, these materials are generally well suited to micro fabrication processes and electrically conductive so they can be used in capacitative and resistive type pressure sensors.

REFERENCES:
patent: 4531415 (1985-07-01), Orlowski et al.
patent: 4572000 (1986-02-01), Kooiman
patent: 5230248 (1993-07-01), Cucci et al.
patent: 5285097 (1994-02-01), Hirai
patent: 5442962 (1995-08-01), Lee
patent: 5965821 (1999-10-01), Grudzien
patent: 261972 (1988-03-01), None
patent: 756164 (1997-01-01), None
patent: WO 2003/106952 (2003-12-01), None

Affiliated with

Also associated with

Rating

Pressure sensor with conductive ceramic membrane does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor with conductive ceramic membrane, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor with conductive ceramic membrane will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3806196