Pressure sensor with a hall element circuit

Details Pressure sensor with a hall element circuit Pressure sensor with a hall element circuit

1983-02-22

1984-12-11

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73728, 73DIG3, 338 41, G01L 900, H01L 1010

Patent

active

044870744

ABSTRACT:
A deformable pressure chamber (10) moves a permanent magnet (12) carried by it as it is deformed. A GaAs Hall element (13) is disposed on a substrate plate (1) opposite the permanent magnet, and the substrate plate also carries a hybrid circuit including a temperature compensating network of thick film resistors and an amplifier. The Hall element is subject to only small temperature effects, and these are compensated in a circuit that can work with a low supply voltage.

REFERENCES:
patent: 3297418 (1967-01-01), Firestone et al.
patent: 3326719 (1967-06-01), Beltzer et al.
patent: 3575054 (1971-04-01), Glista et al.
patent: 4077262 (1978-03-01), Cholet et al.
patent: 4165653 (1979-08-01), Morehouse et al.
patent: 4254395 (1981-03-01), Herden
patent: 4343180 (1982-08-01), Herden et al.
patent: 4371837 (1983-02-01), Sieverin

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