Pressure sensor with a compressible insert to prevent damage fro

Details Pressure sensor with a compressible insert to prevent damage fro Pressure sensor with a compressible insert to prevent damage fro

1997-01-21

1998-08-11

Dombroske, George M.

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, 73726, 73756, 338 42, 3612834, G01L 906, G01L 912, G01L 908

Patent

active

057929580

ABSTRACT:
A pressure sensor is provided with a compressible insert that is disposed within an internal opening of a potentially frangible component, such as a tubular glass member. If a condensate forms within the internal opening of the tubular glass member, freezing of the condensate can cause it to expand and damage the glass member. The compressible insert absorbs the expansion of the liquid condensate by compressing and prevents the expanding condensate from cracking the tubular glass member. The compressible insert, in a particularly preferred embodiment of this invention, has an opening extending therethrough to facilitate the transmission of pressure throughout the aligned openings of the pressure sensor. In one particular embodiment, a silicone die is etched to provide a cavity and corresponding diaphragm portion on which piezoresistive elements are disposed. The silicon pressure die is attached, by anodic bonding, to the tubular glass member and the tubular glass member is, in turn, attached to a tubular support member. The tubular support member can be attached to a metallic conduit structure to facilitate connection of the pressure sensor to a tube or hose.

REFERENCES:
patent: 4168630 (1979-09-01), Shirouzu et al.
patent: 5184107 (1993-02-01), Maurer
patent: 5186055 (1993-02-01), Kovacich et al.
patent: 5257546 (1993-11-01), Tobita et al.
patent: 5351550 (1994-10-01), Maurer
patent: 5410916 (1995-05-01), Cook et al.
patent: 5412994 (1995-05-01), Cook et al.
patent: 5515732 (1996-05-01), Willcox et al.

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