Pressure sensor utilizing magnetostriction effect

Details Pressure sensor utilizing magnetostriction effect Pressure sensor utilizing magnetostriction effect

1991-11-08

1994-04-19

Woodril, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73DIG2, 336 30, G01L 916

Patent

active

053035950

ABSTRACT:
A pressure sensor in which a magnetostriction effect of an amorphous magnetic alloy is utilized. It is an object of the invention to suppress the thermal sensitivity change of the pressure sensor and to improve the lineality and the hysteresis of sensor output. The pressure sensor comprises a cylindrical columnar hollow body with a pressure introducing opening, a deforming part of which body is distorted by a pressure introduced from the pressure introducing opening, the deforming part being a peripheral wall of the body, and a thin film made of an amorphous magnetic alloy having a magnetostriction property which is fitted around and bonded to the deforming part, wherein the film, which is curved to have a cylindrical shape and annealed before it is provided around the cylindrical columnar deforming part, has a curvature different from a curvature of the cylindrical columnar deforming part.

REFERENCES:
patent: 4938069 (1990-07-01), Shoji et al.
patent: 5165284 (1992-11-01), Shoji et al.

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