Pressure sensor using elements operating with acoustic surface w

Details Pressure sensor using elements operating with acoustic surface w Pressure sensor using elements operating with acoustic surface w

1997-09-12

1999-12-21

Oen, William

Measuring and testing

Fluid pressure gauge

Vibration type

G01L 1100

Patent

active

060033789

ABSTRACT:
A pressure sensor with a reflective acoustic surface wave (SAW) delay line fashioned on a pressure-sensing membrane having at least three reflectors wherein the delay line extends over both an expanding region and a compressing region of the pressure-sensing membrane.

REFERENCES:
patent: 4382386 (1983-05-01), Coussot et al.
patent: 4994798 (1991-02-01), McColl
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, vol. UFFC 34, No. 2, Mar. 1987, pp. 253-258.
1992 Ultrasonics Symposium pp. 147-150 (no month).
Fachhochschule Landshut-5 pages (no date).
IEEE Transactions on Sonics and Ultrasonics, vol. SU-20, No. 2, Apr. 1973 pp. 124-133.
1994 IEEE International Frequency Control Symposium pp. 345-351 (no mo.).
1994 IEEE International Frequency Control Symposium pp. 395-400 (no mo.).

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