Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1995-09-11
1996-10-22
Chilcot, Richard
Measuring and testing
Fluid pressure gauge
Diaphragm
73723, 73753, G01L 900
Patent
active
055678823
ABSTRACT:
The pressure sensor comprises an air-tight vacuum chamber consisting of a hollow cylinder and a pressure-reception diaphragm. The pressure-reception diaphragm is provided to face a space communicating with a space of an object to be measured. A field emission cold cathode device is provided on the inner surface of the pressure-reception diaphragm. The cold cathode device comprises a lot of emitter electrodes arranged in a matrix manner for emitting electrons, and gate electrodes for drawing out electrons. Two anode electrodes facing the cold cathode device are provided on the inner end surface of the cylinder. The anode electrodes are connected to a differential amplifier for amplifying a variation in output distribution between them.
REFERENCES:
patent: 5163328 (1992-11-01), Holland et al.
patent: 5277067 (1994-01-01), Holland et al.
patent: 5301554 (1994-04-01), Kane et al.
Strain Gauges, Kinds and Uses; Sec. 5.2.3; "Diaphragm Types"; Hermann K. P. Neubert; 1967, pp. 140-143.
Sensors and Actuators A, 34; "A Study on Field-Emission Array Pressure Sensors"; pp. 137-154; H.-C. Lee, et al.; 1992.
Ichimura Kouichi
Masumoto Hiroshi
Nakamoto Masayuki
Obama Masao
Amrozowicz Paul D.
Chilcot Richard
Kabushiki Kaisha Toshiba
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