Pressure sensor structure

Details Pressure sensor structure Pressure sensor structure

1998-08-13

2000-05-09

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

73727, 257419, G01L 908, G01L 912

Patent

active

060587814

ABSTRACT:
A pressure sensor including a substrate having a diaphragm portion. A diaphragm-defining recess is recessed inwardly from one surface of the substrate to define the diaphragm portion between a bottom surface of the recess and an opposite surface of the substrate. A recess is disposed within the diaphragm portion. A pressure sensitive arrangement is disposed in the substrate, a detector portion of which is disposed within the recess formed within the diaphragm portion.

REFERENCES:
patent: 3744317 (1973-07-01), Hessinger
patent: 4287501 (1981-09-01), Tominaga et al.
patent: 4314226 (1982-02-01), Oguro et al.
patent: 4881056 (1989-11-01), Mizukoshi et al.
patent: 5186054 (1993-02-01), Sekimura
patent: 5493470 (1996-02-01), Zavracky et al.
patent: 5683594 (1997-11-01), Hocker et al.

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