Pressure sensor module having stress isolation platform

Details Pressure sensor module having stress isolation platform Pressure sensor module having stress isolation platform

2006-02-07

2006-02-07

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

06993975

ABSTRACT:
A pressure sensor module is provided with an isolation platform which isolates stress. The pressure sensor module includes a base structure and a cantilever member formed in the base structure by an isolation gap. A pressure sensing element is located on the cantilever member such that the cantilever member provides stress isolation to the pressure sensing element.

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patent: 43 42 665 (1995-06-01), None
patent: 0 263 190 (1988-04-01), None

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