Pressure sensor module and pressure detecting device

Details Pressure sensor module and pressure detecting device Pressure sensor module and pressure detecting device

2008-05-06

2008-05-06

Thompson, Jewel (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

11569915

ABSTRACT:
A pressure sensor module2, wherein a holding space34is formed between a diaphragm22and a thin film layer31, and a vent hole321communicating with the exterior of a first case is provided in the holding space34. In the above pressure sensor module, even when a corrosive gas or chemical solution is used as a fluid to be measured and a corrosive gas component originated from the fluid to be measured permeates into the holding space34, the permeated corrosive gas component can be discharged to the outside of the case through the vent hole321. As a result, the corrosion of the diaphragm22by the fluid to be measured can be prevented, which results in the achievement of a prolonged service life of the pressure sensor module2.

REFERENCES:
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patent: 2552093 (1996-08-01), None
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patent: 3323513 (2002-06-01), None
patent: 3410568 (2003-03-01), None
patent: 3410711 (2003-03-01), None

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