Pressure sensor module

Details Pressure sensor module Pressure sensor module

2009-05-28

2010-12-14

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S754000, C073S756000

Reexamination Certificate

active

07849749

ABSTRACT:
A pressure sensor module of the invention includes a pressure sensor and a laminar substrate. Electrodes are arranged in the vicinity of a diaphragm portion of the pressure sensor. In the laminar substrate, a plurality of substrates are laminated, and the laminar substrate incorporates the pressure sensor. One face of the diaphragm portion is exposed by a space portion. According to the invention, it is possible to provide a pressure sensor module which facilitates smaller and thinner sizes, and which enables high-density packaging.

REFERENCES:
patent: 7210357 (2007-05-01), Tanaka et al.
patent: 2005/0204822 (2005-09-01), Schumacher
patent: 2006/0185437 (2006-08-01), Sato et al.
patent: 04-095740 (1992-03-01), None
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patent: 11-326088 (1999-11-01), None
patent: 2005-091166 (2005-04-01), None
patent: 2006-177925 (2006-07-01), None
patent: 2004/068096 (2004-08-01), None
patent: 2007/083748 (2007-07-01), None

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