Pressure sensor including a diaphragm having a protective layer

Details Pressure sensor including a diaphragm having a protective layer Pressure sensor including a diaphragm having a protective layer

1990-03-26

1991-12-31

Kwon, John T.

Expansible chamber devices

Collapsible chamber wall portion

Wall portion formed of flexible material

92103M, 73715, 73717, 73723, 73721, F01B 1900

Patent

active

050761471

ABSTRACT:
The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.

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patent: 4905575 (1990-03-01), Knecht et al.
patent: 4932265 (1990-06-01), Skuratoysky et al.
Roempps Chemie-Lexikon, 1987, pp. 3850-3853, Otto-Albrecht, Neumueller, Germany.

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