Pressure sensor having thin pressure sensing membrane

Details Pressure sensor having thin pressure sensing membrane Pressure sensor having thin pressure sensing membrane

2007-08-28

2007-08-28

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000

Reexamination Certificate

active

11446228

ABSTRACT:
A pressure sensor is provided having a chamber partially defined by a flexible membrane which is less than three microns thick, exposed to fluid pressure and is configured to deflect from a reference position due to changes in the fluid pressure, and associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure.

REFERENCES:
patent: 4314225 (1982-02-01), Tominaga et al.
patent: 4572000 (1986-02-01), Kooiman
patent: 5285097 (1994-02-01), Hirai
patent: 5442962 (1995-08-01), Lee
patent: 5557972 (1996-09-01), Jacobs et al.
patent: 5853020 (1998-12-01), Widner
patent: 5965821 (1999-10-01), Grudzien
patent: 5987995 (1999-11-01), Sawatari et al.
patent: 6405132 (2002-06-01), Breed et al.
patent: 6484080 (2002-11-01), Breed
patent: 6526352 (2003-02-01), Breed et al.
patent: 6533316 (2003-03-01), Breed et al.
patent: 6648367 (2003-11-01), Breed et al.
patent: 6662642 (2003-12-01), Breed et al.
patent: 6733036 (2004-05-01), Breed et al.
patent: 6738697 (2004-05-01), Breed
patent: 6741169 (2004-05-01), Magiawata et al.
patent: 6758089 (2004-07-01), Breed et al.
patent: 6768944 (2004-07-01), Breed et al.
patent: 7047814 (2006-05-01), Zias et al.
patent: 7086288 (2006-08-01), Lee et al.
patent: 261972 (1988-03-01), None
patent: 756164 (1997-01-01), None
patent: WO 03/106952 (2003-12-01), None

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