Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1998-03-09
2000-03-14
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310328, 29 2535, H01L 4108
Patent
active
060377038
ABSTRACT:
A pressure sensor comprising a flexible substrate, and a piezoelectric element for detecting a pressure,. The piezoelectric element includes a piezoelectric layer and an electrode layer which are formed on at least one of the opposite sides of the flexible substrate such that the piezoelectric layer is disposed between the flexible substrate and the electrode layer. The pressure sensor is characterized by the formation of the piezoelectric layer by hydrothermal synthesis or hydrothermal crystallization method.
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Isaji Masahisa
Kambe Yumi
Dougherty Thomas M.
Tokai Rubber Industries Ltd.
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