Pressure sensor having gauge resistors and temperature compensat

Details Pressure sensor having gauge resistors and temperature compensat Pressure sensor having gauge resistors and temperature compensat

1995-03-14

1996-12-10

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73721, 73727, 73115, G01L 1904

Patent

active

055832954

ABSTRACT:
A pressure detector comprises a pressure sensitive element composed of a semiconductor substrate having at least four gauge resistances and outputting signal in response to a pressure. A pressure transmission member is provided on the surface having the gauge resistors of the pressure sensitive element, for transmitting the pressure to the pressure sensitive element. Taking a crystal face of (110) as the face orientation of the pressure sensitive element, a bridge circuit is constructed by disposing a pair of gauge resistors in the direction of <110> of the crystal axis, disposing another pair of gauge resistors in the direction of <100> of the crystal axis and by connecting them each other. The bridge circuit is located within a pressurized surface which the pressure transmission member presses. Further, temperature compensating resistors are disposed in the direction of <100> of the crystal axis so as to be located also within the area of the pressurized surface.

REFERENCES:
patent: 3736436 (1973-05-01), Crites
patent: 3772628 (1973-11-01), Underwood et al.
patent: 4173900 (1979-11-01), Tanabe et al.
patent: 4829814 (1989-05-01), Suzuki et al.
patent: 4833929 (1989-05-01), Omura et al.
patent: 4965660 (1990-10-01), Ogihara et al.
patent: 4993266 (1991-02-01), Omura et al.
patent: 5199303 (1993-04-01), Benedikt et al.
patent: 5249468 (1993-10-01), Benedikt et al.
patent: 5315875 (1994-05-01), Benedikt et al.
patent: 5353633 (1994-10-01), Benedikt et al.
Ueda, et al: "Combustion Pressure Sensor with Pirzoresistive Silicon Device", Jidoushagijutsukai 924, vol. 3 Oct. 1992, No. 924126: pp. 53-56.
Journal of Nippondenso Technical Disclosure, Sep. 15, 1993, No. 92-220.

Affiliated with

Also associated with

Rating

Pressure sensor having gauge resistors and temperature compensat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor having gauge resistors and temperature compensat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor having gauge resistors and temperature compensat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-425369