Pressure sensor having an insulating layer and fluid tight amorp

Details Pressure sensor having an insulating layer and fluid tight amorp Pressure sensor having an insulating layer and fluid tight amorp

1997-04-11

2000-07-11

Oen, William

Measuring and testing

Fluid pressure gauge

Electrical

G01L 900, G01L 916

Patent

active

060855967

ABSTRACT:
The invention relates to a pressure or differential pressure sensor comprising a membrane with at least one measuring element located thereon, as well evaluation electronics for measuring the membrane deflection. The membrane is covered against environmental influences with a protective layer and is gripped within a mounting in a pressure tight manner. The protective layer is composed of a fluid tight amorphous metal layer, a so called metal glass layer which with the interposing of an electrically insulating layer, is directly deposited onto the membrane, the measuring element located thereon and where appropriate, onto further electronic components located thereon. In this manner, on the one hand, the membrane is protected but on the other hand it may be deflected sensitively since the amorphous metal layer is fluid and gas tight even with layer thicknesses in the .mu.m region.

REFERENCES:
patent: 3505634 (1970-04-01), Von Vick
patent: 4686764 (1987-08-01), Adams et al.
patent: 4732042 (1988-03-01), Adams
patent: 4737756 (1988-04-01), Bowman
patent: 4770036 (1988-09-01), Porth et al.
patent: 4797166 (1989-01-01), Von Ellmen et al.
patent: 4880482 (1989-11-01), Hashimoto et al.
patent: 4897360 (1990-01-01), Guckel et al.
patent: 4999317 (1991-03-01), Lu et al.
patent: 5062302 (1991-11-01), Peterson et al.
patent: 5095401 (1992-03-01), Zavracky et al.
patent: 5104848 (1992-04-01), Miedema et al.
patent: 5202572 (1993-04-01), Kobayashi
patent: 5549797 (1996-08-01), Hashimoto et al.
patent: 5631428 (1997-05-01), Catanescu et al.
patent: 5801068 (1998-09-01), Sooriakumar et al.
European Search Report completed Jan. 20, 1999 in European Patent Application EP 97 10 5395.
"Phase Separation in Interactions of Tantalum-Chromium Alloy on Si", C. J. Palmstrom, J. Gyulai and J. W. Mayer, Published in J. Vac. Sci. Technol. A 1(2), Apr.-Jun. 1983, Copyright 1983 Americn Vacuum Society.
ISBN 0-87339-294.9, "Metallic Glasses Update", Micromechanics of Advanced Materials 1995 (no month).

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