Pressure sensor having a rotational response to the environment

Details Pressure sensor having a rotational response to the environment Pressure sensor having a rotational response to the environment

2010-10-08

2011-12-27

Caputo, Lisa (Department: 2855)

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

C374S141000

Reexamination Certificate

active

08083405

ABSTRACT:
Methods and systems of the invention are directed to a pressure sensor that includes a substrate, a first conductive plate, and a second conductive plate. The substrate is formed of a material having a low coefficient of thermal expansion (CTE). The first conductive plate is formed of a material having a CTE that is higher than the CTE of the substrate, and is attached to a first surface of the substrate. The second conductive plate is rotatably connected to the substrate through a hinge, and includes a portion that is adjacent to the first conductive plate.

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