Pressure sensor having a laminated substrate

Details Pressure sensor having a laminated substrate Pressure sensor having a laminated substrate

1992-01-24

1994-02-15

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

296211, 73721, 73756, 338 4, G01L 906

Patent

active

052856909

ABSTRACT:
A pressure sensor sub-assembly (18) has a solid-state sensing element (22) mounted on a laminated ceramic substrate (20) and has the electrical signal contacts (22a) on the sensing element electrically connected to connector pins (24) on the substrate. A manufacturing process can fabricate a batch of sub-assemblies on a substrate structure that is sub-divided to form the separate sub-assemblies. The sensor sub-assemblies can be tested, and graded, before or after the sub-division step, and then each mounted in a housing.

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